Method for measuring temperature of surface irradiated by electron beam

This paper describes a method for measuring the surface temperature of a solid irradiated by an electron beam in x-ray electronprobe apparatus and electron microscopes. Temperature is determined by the rate of deposition on the surface of a polymer contaminated coating containing carbon atoms. The deposition rate is measured by x-ray electron-probe microanalysis according to the increase, with increase in coating thickness, in the intensity of the characteristic radiation of the carbon CK-alpha.