Formgebung von Mikrobauteilen und Mikrostrukturen aus Keramik

Based on thermoplastic shaping the manufacturing of ceramic microcomponents has been developed. Structured silicon wafers were used as models, which were transformed into ceramic components considering their shrinkage. Due to the optimal flow behaviour of thermoplastic ceramic suspensions green bodies could be shaped with structure dimensions up to 20-30 μm at aspect ratios of 7-10.