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CHEMICAL VAPOR DEPOSITION OF COPPER FOR MICROELECTRONIC DEVICES BASED ON SILICON
CHEMICAL VAPOR DEPOSITION OF COPPER FOR MICROELECTRONIC DEVICES BASED ON SILICON
1991
H. Dallaporta
Z. Hammadi
R. Pierrisnard
A. Cros
Keywords:
Metallurgy
Chemical vapor deposition
Copper
Combustion chemical vapor deposition
Microelectronics
Chemistry
Silicon
Correction
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