Production of Si3N4/Glass Composites for LTCC Substrate by Aqueous Tape Casting Process

In this work, Si3N4/glass sheets were prepared by aqueous tape casting, and the preparation process and properties of green and sintered tapes were discussed thoroughly. The effect of Si3N4 content on the rheological behavior of the slurries was investigated, and the results showed that the viscosity of the slurry increased with the solid loading and all the slurries exhibited shear-thinning behavior within the entire range of shear rate. Green tapes were fabricated successfully by aqueous tape casting which have excellent properties such as uniform pore distribution, low porosity, and high bulk density. The sintered samples exhibited low shrinkage, and low dielectric constant and loss.