The method of manufacturing the multilayer piezoelectric ceramic component
2005
The internal electrode layer 2 is made of a conductive portion 5 and the non-conducting portion 6 for the main component Ag, non-conductive portion 6 is composed of a ceramic columns 6a and the gap portion 6b ceramic material is filled. The ratio between the average diameter x of the non-conducting portion 6 and the thickness y of the ceramic layer is 0.08 to 0.33, the ratio of the thickness y of the thickness z of the ceramic layer 1 of the inner electrode layer 2 from 0.04 to 0 is .40, the coverage of the internal electrode layer 2 is 60 to 95%. Laminated piezoelectric ceramic component uses a conductive paste containing 20 to 50 wt% based on the total solid content of the ceramic powder having a specific surface area of 5 to 20 times greater than the specific surface area of the metal powder, 0.5 It is produced by firing in a low oxygen atmosphere of 21 vol%. Further, the gap portion 6b is more than 60% of the non-conducting portion is preferred. Thus it has a large amount of displacement, and it is possible to obtain an excellent laminated piezoelectric ceramic component bonding strength.
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