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Surface Passivation Effect on SGOI Nanowire Biosensor in High Ge Fraction Fabrication
Surface Passivation Effect on SGOI Nanowire Biosensor in High Ge Fraction Fabrication
2013
Kow-Ming Chang
Chu-Feng Chen
Chiung-Hui Lai
Cheng-ting Hsieh
Chin-ning Wu
Yu-Bin Wang
Chung Hsien Liu
Kuo-Chin Chang
Keywords:
Nanowire
Biosensor
Analytical chemistry
Passivation
Materials science
Optoelectronics
Fabrication
Correction
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