Conductance Enhancement of Nano-Particulate Indium Tin Oxide Layers Fabricated by Printing Technique

To improve the conductance of nano particulate indium tin oxide (In2O3:Sn, ITO) layers we have applied a number of treatments: post bake, infiltration by an ITO precursor solution with subsequent sol-gel transformation into ITO, treatment with etching agents as well as annealing in vacuum. We obtained a maximum conductance of 120 � -1 cm -1 by combining the precursor infiltration technique with vacuum annealing. Considering the layer thickness of 5.2 µm, this value corresponds to a sheet resistance of about