Pulse-periodic abnormal glow discharge in nitrogen, argon, hydrogen and their mixtures
2016
Abnormal glow discharge in the pulse-periodic mode in Ar, H2, N2, Ar+N2, and N2+H2 was investigated. Current-voltage characteristics, Langmuire probe and optical spectroscopy data were analysed. The electron temperature of 2-5 eV and concentration of 1-3 x1010 cm-3 have been measured. Lines of N2 N2 +, N, N+, NHx, Ar+, Ar, Ti, Fe, H, and OH have been detected by optical spectrometry. Dependences of intensities of spectral lines of N2, N2 +, N, and N+ on Ar and H2 content in gas mixtures were measured.
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