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Application of wet chemical etching in fabrication process of GaAs/AlGaAs quantum dot arrays
Application of wet chemical etching in fabrication process of GaAs/AlGaAs quantum dot arrays
2000
Xinghua Wang
Aimin Song
Wenchao Cheng
Guohua Li
Chengfang Li
Yuexia Li
Pingheng Tan
Keywords:
gaas algaas
Quantum dot
Optoelectronics
Materials science
Fabrication
Isotropic etching
process
Correction
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