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Metal-Al2O3-GaN capacitors with an ultraviolet/ozone plasma-treated interface
Metal-Al2O3-GaN capacitors with an ultraviolet/ozone plasma-treated interface
2020
Kwangeun Kim
Ji Soo Kim
Jiarui Gong
Dong Liu
Zhenqiang Ma
Keywords:
Analytical chemistry
Ultraviolet
Capacitor
Metal
Ozone
Plasma
Physics
Correction
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