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Plasma Damage of Porous Low-k Materials
Plasma Damage of Porous Low-k Materials
2014
Maxime Darnon
Thierry Chevolleau
R. Hurand
David Fuard
R. Bouyssou
Nicolas Posseme
Christophe Licitra
Geraud Dubois
Olivier Joubert
Keywords:
Porosity
Composite material
Plasma
Materials science
Correction
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