Contamination Control in the Projection Optics Box - part II

Here we show how electron-induced surface chemistry can provide an effective means of cleaning off thick carbonaceous films from a ruthenium surface to the required degree under process conditions at ambient temperature. Using single crystal Ru(0001) to simulate the capped multilayer we show that in the presence of low energy electrons, both nitrogen monoxide and dioxygen can remove carbonaceous films from heavily contaminated Ru(0001) surfaces. We also show that under similar conditions, carbon monoxide can be used subsequently to reduce the oxidized surfaces generated by the oxidative step. A combination of these two methodologies provides the basis for a viable solution of the practical problem