Data storage applications based on LiCoO2 thin films grown on Al2O3 and Si substrates

Abstract In this study, LiCoO 2 thin films were investigated for data storage applications based on scanning probe mediated approaches. LiCoO 2 , compared to other materials proposed for scanning probe mediated nanoscale patterning, is highly stable and exhibits reversible electrochemical surface modifications. LiCoO 2 thin films have been grown by pulsed laser deposition on Al 2 O 3 and Si substrates over a range of deposition temperatures. The crystal structure and the microstructure of the films has been inferred through in- and out-of-plane X-ray diffraction studies and high-resolution transmission electron microscopy, respectively. The influence of the film deposition temperature on the surface electrical properties of the LiCoO 2 films is discussed along with the relevant mechanism of surface resistance modification.