Optically transparent indium-tin-oxide (ITO) ohmic contacts in the fabrication of vertical-cavity surface-emitting lasers

The authors report what they believe to be the first successful fabrication of an InGaAs/GaAs vertical-cavity surface emitting laser (VCSEL) using optically transparent indium-tin-oxide (ITO) ohmic contacts to p- and n-type regions of the laser. Threshold current densities J/sub th/ are similar to those lasers fabricated from the same wafer using conventional ohmic contacts.