Gas jet deposition of metallic, semiconducting and insulating thin films; Annual report, June 22, 1988--August 1, 1989

As outlined in the Work Calendar of our proposal, we would, in our second year, initiate activities concerned with the following: (1) the effect of impact energy on film properties; (2) mass spectrometric determination of clustering onset in our nozzles; and (3) direct measurement of impact energy via time of flight experiments. In parallel with these projects, we continue to pursue our first year goals: to develop existing and new deposition sources, refine the computer control of substrate motion devices, and determine optimum deposition conditions. Projects (1), (2), and (3) are indeed underway. We expect that by the end of the year we will have more to say about projects (1) and (3). Our research activities since last summer are described.