Optical properties of conductive ZnO films near infrared frequency

To know the optical constants, n and k, in transparent conductive zinc oxide (ZnO) films, both spectroscopic ellipsometry (SE) and reflectance-transmittance (RT) method have been adopted. The optical constants, n and k deduced from the SE are different from those estimated from the RT method. We will discuss these differences through the deduced physical parameters in magnetron sputtered Ga-doped ZnO films. (© 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)