Fabrication of nano-sized AlGaN alloy by dry milling and thermal annealing

Abstract Al 0.61 Ga 0.39 N alloy nano-powders were obtained by a thermal annealing process from the Al+GaN system in NH 3 flow. The activation process of nano-sized Al and GaN powders during dry milling in N 2 plays a key role in the formation of the AlGaN alloy. A too high fraction of aluminium leads to AlN, while a too low fraction results in insufficient activation of the Al powder. The GaN localized mode and the AlN localized mode of the E 2 phonon frequency, and the one-mode-type behavior of the A 1 (LO) and A 1 (TO) phonon frequencies were observed in the Raman spectra of the alloy.