The study of the synthesis of carbon nanomaterials by the plasma-enhanced chemical vapour deposition method

Ye. Yerlanuly,D. G. Batryshev,Maratbek Gabdullin,Tlekkabul Ramazanov,K.N. Ibrashev,W. Kang

The study of the synthesis of carbon nanomaterials by the plasma-enhanced chemical vapour deposition method

2021

Ye. Yerlanuly
D. G. Batryshev
Maratbek Gabdullin
Tlekkabul Ramazanov
K.N. Ibrashev
W. Kang

In this work, the results of a study of the synthesis of carbon nanomaterials by plasma-enhanced chemical vapour deposition at various plasma parameters, including at low discharge powers, are pres...

Keywords:

Raman spectroscopy
Scanning electron microscope
carbon nanomaterials
Chemical vapor deposition
deposition temperature
Plasma parameters
Chemical engineering
Materials science

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