Stack-ZTSCR을 이용한 높은 홀딩 전압을 갖는 Power Clamp용 ESD 보호 소자에 관한 연구

In this paper, n-Stack HHVSCR(High Holding Voltage SCR) ESD device with the high holding voltage is proposed. The proposed ESD protection device suits more than 10V for power clamp. The device has the high holding voltage using Stack-HHVSCR. In the simulation results, 2-stack has holding voltage of 15V and 3-stack has holding voltage of 23V, and 4-stack has holding voltage of 31V.