Old Web
English
Sign In
Acemap
>
Paper
>
Static and Dynamic MEMS device characterisation
Static and Dynamic MEMS device characterisation
2007
Eleonora Ferraris
Irene Fassi
Biagio De Masi
R. Rosing
Andrew Richardson
Keywords:
Electronic engineering
Microelectromechanical systems
Materials science
Mechanical engineering
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]