Crystalline silicon wafer texture etching solution composition and texture etching method (2)
2011
Texture etching solution composition and texture of the present invention relates to an etching method of a crystalline silicon wafer, and more particularly, relates to a crystalline silicon wafer texture etching method and an etching solution composition, wherein the composition comprises an alkali compound and a specific polyvinyl structure glycol-based compound, thus forming a micro structure in the cone with respect to the control of the etching rate difference between the silicon crystal orientation on the surface of the crystalline silicon wafer, thereby preventing the base compounds due to over-etching, so that the texture of each position minimizing the variation in quality, and result in increased efficiency.
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