THE EVALUATION OF SURFACE MORPHOLOGY USING FLEXURE GUIDED NANO-POSITIONING SYSTEM AND ULTRA-PRECISION LATHE

In this study, piezoelectric actuator, Flexure guide, Power transmission element and control method and considered for Nano-positioning system apparatus. The main objectives of this thesis were to develop the 3-axis Ultra-precision stages which enable the 3-axis control by the manipulation of the piezoelectric actuator and to enhance the precision of the Ultra-Precision CNC lathe which is responsible for the ductile mode machining of the hardened-brittle material where the machining is based on the single crystal diamond. Ultra-precision CNC lathe is used for machining and motion error of the machine are compensated by using 3-axis Ultra-precision stage. Through the simulation and experiments on ultra-precision positioning, stability and priority on Nano-positioning system with 3-axis ultra-precision stage and control algorithm are secured by using NI Labview. And after applying the system, is to analyze the surface morphology of the mold steel (SKD61)