Characterization of MEMS Devices for the Study of Superfluid Helium Films

Measurements on the mechanical properties of MEMS resonators were performed to characterize such devices at room temperature and low temperatures. Using state-of-the-art silicon integrated circuit technology, we have designed, fabricated, and manufactured resonators consisting of a pair of parallel plates with a well-defined gap whose size can be controlled with a high accuracy down to the sub-micron range. A full study of resonance properties at various pressures was performed at room temperature. We will discuss the details of design, fabrication, and operation. These studies open up a window of opportunities to look for novel phenomena in quantum fluids such as in superfluid 3He films.