Study for double-layered AZO/ATO transparent conducting thin film

The purpose of this study is to provide transparent conductive composite films, used for such as dye-sensitized solar cells (DSSCs). In this work, transparent conductive oxide films with double-layer structure, ATO(antimony doped tin oxide)films covered on AZO(aluminum doped zinc oxide)films, were prepared on glass substrates by RF magnetron sputtering method. Subsequently the films were post-annealed at different temperature. The structure, surface morphology, optical and electrical properties of the films were investigated as a function of annealing temperature. Our results indicate that the composite films can maintain good electrical and optical properties at a temperature higher than 450°C compared to that of single-layer film.