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Acemap > Paper > RESEARCH OF THIN MEMBRANE METAL OXIDE TIO2 GAS SENSOR WITH NANO POLY-SILICON STRUCTURE MADE BY PLASMA IMMERSION ION IMPLANTATION

RESEARCH OF THIN MEMBRANE METAL OXIDE TIO2 GAS SENSOR WITH NANO POLY-SILICON STRUCTURE MADE BY PLASMA IMMERSION ION IMPLANTATION

2015 
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