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Characterisation of SOI thin film transistors fabricated using SiGe etch stop layers
Characterisation of SOI thin film transistors fabricated using SiGe etch stop layers
1999
S. Uppal
Alastair Armstrong
David McNeill
Paul Baine
Mervyn Armstrong
Harold Gamble
K Yallup
Keywords:
Thin-film transistor
Silicon on insulator
Electronic engineering
Materials science
Optoelectronics
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