Analysis of Influence Factors on Carbon Content of Tantalum Powder in Vacuum Heat Treatment Furnace

The influencing factors of the vacuum heat treatment furnace condition management on the carbon content of tantalum powder were analysed.It focuses on analysis of different heat treatment temperatures, vacuum valve installation limits, and oil diffusion pump condensate wall cooling water connection methods, different pipeline vacuum on after the oil diffusion pumpth, Diffusion pump barrier cooling mode, oil diffusion pump wall different backwater temperature which is influent to the carbon content of tantalum powder.The results show that a higher sintering temperature can effectively reduce the carbon content in tantalum powder and increase the temperature of the vacuum furnace without load.The carbon content of the tantalum powder produced by the vacuum furnace without a stopper is obviously higher than that with a stopper.The vacuum valve of the vacuum furnace needs to be equipped with a stopper to effectively realize the interlocking opening and closing of the valve.The condensate wall cooling water connection method of the oil diffusion pump adopts the method of top-out and bottom-in.that the tantalum content in the production of tantalum powder is obviously higher.The higher the pipeline pressure of the diffusion pump foreline pipeline after the maintenance pump is closed for 6 hours, the higher the carbon content.It should ensure that the diffusion pump pipe in a certain range of pressure.The carbon content in the barrier plate of the oil diffusion pump cooled by freon is obviously lower than that cooled by water, and the outlet temperature of the diffusion pump wall is slightly lower than that of the pump wall, the pump can be added at the outlet end of the diffusion pump wall, effectively solve the problem of high exit temperature and high carbon content in Ta powder produced by vacuum furnace.