Ultraviolet/hot pressing curing type nano-printing method and stamping press

2008 
The invention provides an UV/hot-pressing curing type nano-imprint method in which the imprint process is carried out in vacuum environment, the imprint driving force is controllable and steady high pressure gas, and adjustment and matching are carried out by combining the positive-negative pressure. When a bearing substrate and an imprint platform of an imprint template contact an imprint reference surface for imprinting, the imprint process is realized by an automatic leveling mechanism. The two means of the UV exposure curing as well as the heating and quick cooling curing are integrated, that is, the imprint reference surface is a UV-pervious quartz flat plate, and the imprint platform integrates a vacuum absorption sheet and a temperature-control electric heating furnace with a quick water cooling device and the like. The nano-imprint device obtained by the method has the advantages of reasonable and simple structure, simple operation, reliable and stable performance, high-efficiency and cheap preparation process, and high automation degree.
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