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HDI-13 ACTIVE HEAD SLIDERS USING PIEZOELECTRIC THIN FILMS FOR FLYING-HEIGHT CONTROL
HDI-13 ACTIVE HEAD SLIDERS USING PIEZOELECTRIC THIN FILMS FOR FLYING-HEIGHT CONTROL
2003
Kenji Suzuki
Takayuki Akimatsu
Kenji Sasaki
Masayuki Kurita
Keywords:
Thin film
Composite material
Flying height
Materials science
Piezoelectricity
piezoelectric thin films
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