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A process for forming a deposition film
A process for forming a deposition film
1982
Masaaki Hirooka
Kyosuke Ogawa
Shunichi Ishihara
Isamu Shimizu
Keywords:
Ion plating
Thin film
Atomic layer deposition
Materials science
Combustion chemical vapor deposition
Pulsed laser deposition
Inorganic chemistry
Chemical engineering
Deposition (law)
Correction
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