Ultra-Precision Polishing Methods for Sapphire

Sapphire (Al2O3 crystal) is a hard and inert material with good mechanical, optical, physical and chemical properties that plays important roles in optics and electronics. The surface quality is the key element of sapphire components especially in optical field. This paper mainly introduces four methods of ultra-precision polishing, researches based on polishing theories and slurry. It can be a conclusion that traditional polishing methods can improve material removal rate assisted by ultrasonic.