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6-DoF Full Robotic Calibration Based on 1-D Interferometric Measurements for Microscale and Nanoscale Applications
6-DoF Full Robotic Calibration Based on 1-D Interferometric Measurements for Microscale and Nanoscale Applications
2020
Houari Bettahar
Olivier Lehmann
Cédric Clévy
Nadège Courjal
Philippe Lutz
Keywords:
Optics
Calibration
Interferometry
Microscale chemistry
Nanoscopic scale
Materials science
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