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Ion Beam Analysis of Thin Films on Silicon and Carbon Substrates
Ion Beam Analysis of Thin Films on Silicon and Carbon Substrates
2007
Pelham Keahey
J'Nae Zwaschka
Lucas Phinney
L.J. Mitchell
Khalid Hossian
Jerome L. Duggan
Keywords:
Ion beam
Ion beam analysis
Ultra-high vacuum
Carbon
Thin film
Copper
Materials science
Ion beam deposition
Analytical chemistry
Silicon
Correction
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