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Efficiency of Parallel-Plate Capacitive Radio Frequency Discharge Plasma : Short Note
Efficiency of Parallel-Plate Capacitive Radio Frequency Discharge Plasma : Short Note
2002
Hideki Ikegaki
Shinjiro Tajima
Masao Endo
Hiroshi Amemiya
Keywords:
Capacitive sensing
Plasma
Inductively coupled plasma
Capacitively coupled plasma
Analytical chemistry
Materials science
Equivalent circuit
Electronic engineering
Radio frequency
parallel plate
power absorption
Optoelectronics
Correction
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