With potassium-doped fumed oxides

By means of aerosol with potassium-doped, pyrogenically prepared oxides of metals or metalloids, wherein the base component is a pyrogenically produced oxide, which is doped with potassium from 0.000001 to 20 wt .-%, wherein the doping amount is preferably in the range from 1 to 20000 ppm and the doping component is a salt of potassium, the BET surface of the doped oxide between 1 and 1000 m · 2 · / g, the particle size distribution width is at least 0.7. The doped oxides can be used as polishing material (CMP application).