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Novel Mechanistic Concepts for Acidic Wet Chemical Etching - A Road to Process Optimization
Novel Mechanistic Concepts for Acidic Wet Chemical Etching - A Road to Process Optimization
2008
K. Wambach
I. Röver
Edwin Kroke
S. Patzig-Klein
Keywords:
Isotropic etching
Process optimization
Etching
Inorganic chemistry
Materials science
Process engineering
Nanotechnology
Correction
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