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Automated in-line Metrology for Nanoscale Production - .
Automated in-line Metrology for Nanoscale Production - .
2013
J. Fraxedas
Urs Staufer
R.H. Munnig Schmidt
Jo W. Spronck
Enrique Rull
R. Deng
Georg Schitter
S Messineo
Reinhard Hainisch
Rudolf Saathof
Francesc Pérez-Murano
Albert Verdaguer
A. Blümel
Richard Koops
M. Van Veghel
W. Schott
Denis Dontsov
Thomas Sulzbach
C. Penzkofer
C. Colominas
K. Fluch
Tu Delft
Tu Wien
Ntc Weiz
Nanosurf Ag
Anton Paar
IQS-Universitat Ramon Llull
Keywords:
Metrology
Nanotechnology
Nanoscopic scale
Materials science
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