A microfabricated neural probe with porous si-parylene hybrid structure to enable a reliable brain-machine interface

To establish a reliable brain-machine interface (BMI), we report for the first time, a multifunctional porous silicon (PSi)-parylene neural probe using a CMOS compatible fabrication process. The biodegradable PSi shank serves as a mechanical stiffener for insertion process, then dissolves to leave only the polymeric structure to reduce stiffness mismatch between implant and cortical tissue, thus attenuates tissue responses. Moreover, its porous structure can serve as drug reservoir. The healing of the insertion trauma can be enhanced by continuously releasing pre-loaded drugs with the PSi degradation. Hence, the neural probe enables a more reliable BMI.