Microring Resonator Chemical Sensor Based on Si3N4 Waveguides

Microring resonator based on Si3N4 waveguides was fabricated by using CMOS compatible processes with 1 µm wide waveguides and 200 µm in radius. The optical characteristic of the resonator was measured with a Q factor up to 20,000 and a free spectrum range (FSR) of 1 nm. The structure was further packaged to be a sensor for liquid sensing. Finally, the sensor was applied to detect concentrations of glucose solutions with sensitivity of 1.78×10-5 refractive index unit (RIU), which proves its functionality and feasible application as high sensitivity chemical sensor.