Method for producing a thermoelectric conversion material
2013
The present invention, thermoelectric composition ratio of the thermoelectric semiconductor material as a raw material in the porous substrate to form a thermoelectric film that reflects accurately, excellent adhesion between the porous substrate and the thin film, and excellent thermoelectric conversion efficiency conversion material is intended to provide a method for producing, on a porous substrate, in the manufacturing method of two or more of the thermoelectric material thin film is formed of a thermoelectric semiconductor material containing an element using an arc plasma deposition method is the method for producing a thermoelectric conversion material, which comprises a step of performing heat treatment of the thermoelectric semiconductor material step forming a film on the porous substrate, and after the film forming step during and / or film forming step .
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