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Solid-phase crystallization of Ga 2 O 3 thin films on polymers by excimer laser annealing
Solid-phase crystallization of Ga 2 O 3 thin films on polymers by excimer laser annealing
2021
Ryoya Kai
Kazuki Watanabe
Tomoaki Oga
Satoru Kaneko
Akifumi Matsuda
Mamoru Yoshimoto
Keywords:
solid phase crystallization
Chemical engineering
Polymer substrate
Gallium oxide
Polymer
Thin film
Materials science
excimer laser annealing
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