Nanofabrication, Nanoinstrumentation and Nanoassembly by Nanorobotic Manipulation

A nanolaboratory is proposed to realize the capabilities of nanofabrication, nanoinstrumentation and nanoassembly to make three-dimensional structures, devices and systems in the nanoworld. A nanorobotic manipulation system is introduced to realize these capabilities inside a scanning electron microscope or a transmission electron microscope. Some precursors are introduced into the small working space in the nanoworld, so that cutting, bending, peeling and fixing operations in the nanoworld could be realized using nanomanipulators, electron-bean-induced deposition and other methodologies as in the macroworld. After making the three-dimensional structures, the nanodevices such as nanosensors and nanoactuators are fabricated using carbon nanotubes and a focused ion beam chemical vapor deposition process. Some nanodevices for bioapplications are also presented.