0.39-V, 18.26-µW/MHz SOTB CMOS Microcontroller with embedded atom switch ROM

We present an ultra-low-power Microcontroller Unit (MCU) with an embedded atom switch ROM, which performs a 0.33–1.2 V operation voltage and 46.8-µA/MHz active current (or 18.26-µW/MHz active power). The MCU is fabricated by the hybrid of Silicon-On-Thin-Buried-oxide (SOTB) CMOS and bulk CMOS [1]. The SOTB CMOS with a body-bias voltage control realizes a high drivability up to 40-MHz operation at 0.54 V and small sleep power (0.628 µW), simultaneously.