Nanopositioning and fabrication using the Nano Fabrication Machine with a positioning range up to Ø 100 mm

This paper focuses on a new Nano Fabrication Machine 100 (NFM-100) with a working range up to 100 mm in diameter and its integrated tip-based system, which can be used as an Atomic Force Microscope (AFM) as well as for Field-Emission-Scanning-Probe-Lithography (FESPL). The combination of both systems offers the possibility to fabricate and analyze micro- and nanostructures with high resolution and precision down to a single nanometer over a large area in one single configuration without tool or sensor change. After the description of the basic machine structure of the NFM-100, the demonstration of long range and large area AFM scans in combination with the NFM-100 will be shown. Additionally, the basic functionality of the FESPL manufacturing process is presented.