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Polymer free reactive ion beam etching of InP using N2/(CH3)3N
Polymer free reactive ion beam etching of InP using N2/(CH3)3N
2000
C. F. Carlström
Srinivasan Anand
G. Landgren
Keywords:
Ion beam
Polymer
Nitrogen
Etching
Schottky diode
Ion beam deposition
Analytical chemistry
Materials science
Correction
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