Low-cost high-sensitivity integrated pressure and temperature sensor

Abstract A resistive temperature detector along with a capacitive pressure sensor using a silicon membrane have been integrated on a glass substrate. The metrological characteristics of this miniaturized sensor feature a pressure sensitivity of 1.29 pF/bar between 1 and 6 bar and a temperature sensitivity of 6200 ppm/°C between −40 and +130 °C. In the pressure and temperature ranges considered, the main cause of error is non-linearities that generate imprecisions less than or equal to ±3% of the full scales. The technological process allows these new devices to be batch produced.