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Evaluating crystallinity of NbN/AlN/NbN films deposited by atomic layer deposition
Evaluating crystallinity of NbN/AlN/NbN films deposited by atomic layer deposition
2018
Masahiro Ukibe
Fujii Go
Shiki Shigetomo
Ohkubo Masataka
Keywords:
Crystallinity
Atomic layer deposition
Mass spectrometry
Inorganic chemistry
Materials science
Chemical engineering
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