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Ion Energy Distributions at the Cathode of a DC Plasma.
Ion Energy Distributions at the Cathode of a DC Plasma.
2003
Alan Rees
Alex Carew
Ian Neale
Claire Siciliano Greenwood
Yolanda Aranda Gonzalvo
Mark Raymond Buckley
Keywords:
Nitrogen
Water vapor
Plasma
Analytical chemistry
Ion
Cathode
Atomic physics
Chemistry
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