Some applications of low angle neutron scattering to hydrogenated amorphous silicon multilayers

Abstract This paper describes some applications of low angle neutron scattering to evaporated a-Si:H multilayers. The modulation of hydrogen is shown by periodic structures of type Si:H/Si:D/Si:H/Si:D/… or Si/Si:H/Si/Si:D/ … The use of mixtures M=H 1- x D x in type Si/Si:M/Si/Si:M/… samples permits variation of the contrast between the pure silicon layer and the less dense “hydrogenated” silicon layer. Finally, measurements of diffusivity of hydrogen are presented.