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Capacitively Coupled RF Plasmas for the Synthesis of Silicon Nanocrystals: Scaling and Mechanisms
Capacitively Coupled RF Plasmas for the Synthesis of Silicon Nanocrystals: Scaling and Mechanisms
2015
Aram Markosyan
Romain Le Picard
David H. Porter
Steven L. Girshick
Mark J. Kushner
Keywords:
Nanocrystal
Analytical chemistry
Plasma
Scaling
Silicon
Materials science
silicon nanocrystals
Optoelectronics
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